Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films

作者：Kozaki Masatoshi^*; Higuchi Yuichiro; Ikeda Akihiro; Kuriyaki Hisao; Toko Kiyoshi

来源：Sensors and Materials, 2013, 25(7): 471-477.

• oxygen
• gas sensor
• intercalation
• layered material
• microfabrication

A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.

• 出版日期2013