Analysis of the Capacitive Pressure Sensor with Ring Mesa Structure

作者：Kwon Soon Kwan; Cho Hee Chan; Yi Seung Hwan^*

来源：International Journal of Precision Engineering and Manufacturing, 2014, 15(6): 1023-1028.

DOI：10.1007/s12541-014-0431-9

• Capacitive pressure sensor
• Ring mesa
• Circular diaphragm
• Displacement of diaphragm
• Capacitance of pressure sensor
• Laundry machine

The capacitive pressure sensor with ring mesa structure has been simulated and fabricated in order to replace the bulky and inaccurate mechanical pressure sensor which is currently used in laundry machines. A ring mesa structure has been adopted with the same 100 mu m width and positioned at 250 gm distance from the substrate with 50 mu m distance. The center displacement of diaphragm were measured with a good linearity and increased from 0.408 mu m (M 6025) to 1.578 mu m (M 6045) depending on the location of ring mesa structure with the same circular radius of diaphragm. When the ring mesa structure is located 250 mu m distance from the substrate, the simulated capacitance according to the water pressure showed a good linearity with less than 1.3% best-fit nonlinearity error However, as the location of ring mesa moved to the center of diaphragm, the characteristic curves of capacitance has been changed from quasi-linear to nonlinear curves with the best-fit nonlinearity errors, 3.8% (M 6030) and 11.2% (M 6035), respectively Based upon the simulation and experiments, one candidate device has been chosen and will replace the current bulky sensor in the near future.

• 出版日期2014-6