Al Doped ZnO Nanogranular Film Fabricated by Layer-By-Layer Self-Assembly Method and Its Application for Gas Sensors

作者：Hao Weichang^*; Sun Meng; Xu Huaizhe; Wang Tianmin

来源：Journal of Nanoscience and Nanotechnology, 2011, 11(12): 10649-10653.

DOI：10.1166/jnn.2011.3988

• ZnO
• Granular Films
• Gas Sensor
• Layer-By-Layer (LBL)
• Al Doped

ZnO is one of the most promising materials for gas sensor. Nanogranular films with ultrahigh surface-to-volume ratio have great potential in gas sensor application. In this paper, Al doped ZnO nanogranular films were fabricated by layer-by-layer (LBL) self-assembly method and the gas sensitivity of ZnO films were investigated. The results show that sensitivity of Al:ZnO gas sensors is up to 12 against 20000 ppm hydrogen, while the response time and recovery time of the sensor are only 12 s and 25 s respectively. The high sensitivity is attributed to the high surface-to-volume ratio of nanogranular and porous structure of self-assembled films.

• 出版日期2011-12
• 单位北京航空航天大学