Depth from image focus methods for micro-manufacturing

作者：Mahmood Muhammad Tariq; Shim Seong O^*; Alshomrani Saleh; Choi Tae Sun

来源：International Journal of Advanced Manufacturing Technology, 2013, 67(5-8): 1701-1709.

DOI：10.1007/s00170-012-4603-4

• Shape from focus
• Focus measure
• 3D shape
• Bezier curve
• Bezier-Bernstein polynomial
• Micro-manufacturing

The analysis of industrially important electronic components of micro dimensions such as thin film transistor liquid crystal display color filter is of fundamental importance in consumer electronics. Three dimensional (3D) visualization, size, area, and surface roughness are important parameters for the analysis of micro components. For this purpose, the devices equipped with active but expensive depth estimation techniques are commonly used. However, these can be replaced by inexpensive passive methods. In this paper, we propose an inexpensive and simple system for the analysis of micro components. It comprises a CCD camera mounted on a conventional microscope and a passive optical method for 3D shape recovery. To improve the accuracy of the system, we introduce an accurate depth estimation scheme by using cubic degree Bezier-Bernstein polynomial. The proposed system is tested by using image sequences of synthetic and real objects. The experimental results demonstrate the usefulness and effectiveness of the proposed system for the analysis of micro size electronic components.

• 出版日期2013-7