High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement

作者：Koh Joonyoung; Lee Wonhee^*; Shin Jung H^*

来源：Sensors and Actuators A: Physical , 2016, 241: 60-65.

DOI：10.1016/j.sna.2016.02.001

• Microfluidic chip calorimeter
• Vanadium pentoxide thin film thermistor
• Parylene
• Metabolic rate

High sensitivity, on-chip calorimeter platform using V2O5 thin film thermistor was developed. Integration of a V2O5 thermistor with a high temperature sensitivity of -2.2%/K with a vacuum insulated, suspended SIN membrane structure enabled a low thermal conductance of 12 mu W/K and a direct detection of 10 nW of heat with an estimated detection limit of 570 pW. We also investigated the feasibility of integrating the platform with a microfluidic system, and, suggest that, based on numerical simulations, a further 5-fold lowering of detection limit may be possible.

• 出版日期2016-4-15