Multi-resonant capacitive microelectromechanical system switch with high isolation for ultra-wideband applications

作者：Yoon Min Kyu^*; Cheon Seong Jong; Park Jae Y

来源：Micro & Nano Letters, 2013, 8(10): 591-593.

DOI：10.1049/mnl.2013.0302

A multi-resonant capacitive microelectromechanical system switch with wide bandwidth and high isolation has been successfully designed and fabricated for ultra-wideband applications. To achieve high isolation and wide operation frequency bandwidth, three capacitive shunt-connected membranes and meander-shaped inductors with several inductances were utilised in serial connection. Moreover, for achieving a large 'ON'/'OFF' capacitance ratio, a high dielectric aluminium nitride (AlN) film was applied. The measured dielectric relative constant and tangent loss of the AlN film were 8.8 and 0.008, respectively. The capacitive switch has the 'ON'/'OFF' capacitance ratio of 59.6 with the measured capacitances of 52 fF and 3.1 pF at 'ON' and 'OFF' states, respectively. The three resonant frequencies were formed at 4, 5 and 6.5 GHz, and the isolation performances were over 30 dB at the frequencies ranging from 5 to 10 GHz and 70 dB at 6.5 GHz. The size of the fabricated switch was similar to 1.4 x 1.7 x 0.0083 (height) mm(3).

• 出版日期2013-10