Micro/submicro grating fabrication on metals for deformation measurement based on ultraviolet nanoimprint lithography

作者：Wang Qinghua; Kishimoto Satoshi^*; Tanaka Yoshihisa; Kagawa Yutaka

来源：Optics and Lasers in Engineering, 2013, 51(7): 944-948.

DOI：10.1016/j.optlaseng.2013.02.021

• Grating
• Metal
• Deformation
• Ultraviolet nanoimprint lithography
• Strain gauge adhesive

We introduce a new route to fabricate micro/submicro gratings on metals for deformation measurement using a simple and low-cost process. The process is based on ultraviolet nanoimprint lithography using a glass slide as a transfer medium and a replication method by strain gage adhesive. Micro/submicro gratings with a protective layer are successfully produced on metals with poor surface flatness. The removal of the protective layer can further extend the application fields of the generated gratings used in moire methods and geometric phase analysis. As a demonstration, the deformation of an aluminum sample is measured using a fabricated grating.

• 出版日期2013-7