摘要

A 94 GHz low-cost frequency source has been developed using a 47 GHz micromachined air-cavity, oscillator and a 47-to-94 GHz doubler on the thin-film substrate pith the flip-chip interconnection. The 47 GHz micromachined air-cavity oscillator is a parallel feedback configuration using the micromachined air-cavity as a parallel feedback element. As active devices of the oscillator and the doubler, GaAs pseudomorphic high-electron mobility transistors were flip-chip mounted on the thin-film substrate with integrated passives. The developed 94-GHz frequency source has an output power of about 3 dBm and a low-phase-noise of -96 dBcIHz at 1 MHz offset with an oscillation frequency at 94.2.1 GHz. This work allows a low-cost millimeter-wave frequency source.

  • 出版日期2010-1

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