科研之友
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摘要
A miniaturized inertial stepper goniometer with two orthogonal axes (theta and phi axes) has been realized using four shear piezo based actuators arranged in a tetrahedral configuration tangent with a polished sapphire spherical rotor. The measured sensitivity is about 11.5 microdegree (mu degrees) per Volt. The smallest angular step size, achieved with a minimal peak-to-peak voltage U-pp of 200 V is about 0.6 millidegree (m degrees). The crosstalk between both axes is below 10%. Our specific design is used to accurately position a glass fiber, but the concept can be utilized for many different applications as well.
- 出版日期2014-4
