Very large scale characterization of graphene mechanical devices using a colorimetry technique

作者：Cartamil Bueno Santiago Jose^*; Centeno Alba; Zurutuza Amaia; Steeneken Peter Gerard; van der Zant Herre Sjoerd Jan; Houri Samer^*

来源：Nanoscale, 2017, 9(22): 7559-7564.

DOI：10.1039/c7nr01766a

We use a scalable optical technique to characterize more than 21 000 circular nanomechanical devices made of suspended single-and double-layer graphene on cavities with different diameters (D) and depths (g). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D-4/g(3). Moreover, we extract a median adhesion energy of G = 0.9 J m(-2) between the membrane and the native SiO2 at the bottom of the cavities.

• 出版日期2017-6-14