科研之友
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摘要
We propose and demonstrate two types of narrowband multi-channel filters: transmittance-integrated narrow-bandpass filter arrays and reflectance narrowband multi-channel filters. We develop a combinatorial etching technique possessing 32 elements on a single substrate with which to fabricate these integrated narrow bandpass filters. Double-chamber integrated optical filter arrays are fabricated by use of this etching technique. Reflectance can be achieved by combining metal and dielectric materials. These narrowband multi-channel filters and narrow bandpass filter arrays show good filtering features and can be utilized in many optical applications.
- 出版日期2010
- 单位同济大学
