科研之友
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摘要
Resonant properties of a ZnO film bulk acoustic resonator (FBAR) was analyzed based on RF network method. The attenuation of the acoustic media was also taken into account for Q evaluation. Some FBAR samples were developed by using micro-machining silicon processes. They were also tested and measured. It was found that the measured resonant frequencies were in agreement with the theoretical predictions, but the measured Q was much lower. Further investigations revealed the factors which could affect Q of the devices.
- 出版日期2008
