Uniformly spaced lambda/4-shifted Bragg grating array with wafer-scale CMOS-compatible process

作者：Sun Jie^*; Purnawirman; Hosseini Ehsan Shah; Bradley Jonathan D B; Adam Thomas N; Leake Gerald; Coolbaugh Douglas; Watts Michael R

来源：Optics Letters, 2013, 38(20): 4002-4004.

DOI：10.1364/OL.38.004002

We report on an integrated lambda/4-shifted Bragg grating array using a wafer-scale complementary metal-oxide semiconductor (CMOS) compatible process with silicon-nitride waveguides. A sidewall grating was used to simplify the fabrication process, and a sampled Bragg grating with equivalent phase-shift structure was employed to achieve an accurate lambda/4 phase shift. A four-channel lambda/4-shifted Bragg grating array with highly uniform channel spacing was demonstrated with a measured channel spacing variation below 10 pm (1.25 GHz). The high channel-spacing uniformity and the CMOS-compatibility of the demonstrated device hold promise for integrated distributed feedback laser arrays for various silicon photonic applications.

• 出版日期2013-10-15
• 单位MIT