Nano-structure formed by nanosecond laser annealing on amorphous Si surface

作者：Klinger D; Lusakowska E; Zymierska D^*

来源：Materials Science in Semiconductor Processing, 2006, 9(1-3): 323-326.

DOI：10.1016/j.mssp.01.027

• ablation laser impact on surfaces
• annealing effects on microstructure
• atomic force microscopy
• surface structure
• laser beam annealing

The formation of nano-structure on an amorphised Si surface is studied upon annealing by a nanosecond laser pulse of an excimer laser. The resulting structures are studied by means of the reflection high-energy electron diffraction technique and atomic force microscopy. Smoothing out of the post-implanted islands and then the formation of polycrystalline Si grains are observed in surfaces annealed with the energy density up to the threshold value.

• 出版日期2006-6