Absolute ultra-precision measurement of high-numerical-aperture spherical surface by high-order shift-rotation method using Zernike polynomials

作者：Yang, Zhongming; Gao, Zhishan; Zhu, Dan; Yuan, Qun^*

来源：Optics Communications, 2015, 355: 191-199.

DOI：10.1016/j.optcom.2015.06.033

• Interferometry
• Absolute measurement
• Misalignment aberration
• High numerical aperture
• Shift-rotation

We propose a high-order shift-rotation absolute ultra-precision measurement method to calibrate the misalignment aberration and reference surface deviation in high-numerical-aperture spherical surface testing. Based on high-order approximation, the high-order misalignment aberrations are deduced. Both the computer simulation and experimental results confirm the feasibility of the proposed absolute ultra-precision measurement method. The high-order misalignment aberrations and reference surface deviation can be removed from the measured results by our absolute measurement method. The high-order shift-rotation absolute measurement method can get the accuracy of nanometer level in high-numerical-aperture spherical surface testing.

• 出版日期2015-11-15
• 单位中国科学院电工研究所; 南京理工大学