科研之友
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摘要
We have studied a laser direct writing system for the fabrication of gray-scale diffractive optic elements in terms of its system characteristic curve, which can be understood as a composite function of the characteristic curve for an acousto-optic modulator employed for dose gray-scaling and that for a photoresist used for continuous profile formation. A mathematical analysis method was developed and applied to retrieve the two constituent characteristic curves for the acousto-optic modulator and the photoresist from the system characteristic curves. The validity of the results was confirmed through comparison with direct measurements.
- 出版日期2011-11
