科研之友
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摘要
In this study, an all-polymer electrolytic tilt sensor with conductive and corrosion-resistant poly(dimethylsiloxane) (PDMS) electrodes was designed and its performances were characterized. A PDMS cavity in the sensor for holding an electrolyte was fabricated by soft lithography using an ultraviolet-sensitive polymer. A conductive PDMS composite (gPDMS) with graphite powder was used for the electrode to measure the inclination angle of the electrolyte. A gPDMS composite with a graphite concentration above 40wt% was able to function as a conductive polymer. The fabricated all-polymer tilt sensor exhibited a detectable inclination range of +/- 60 degrees and showed a relatively linear output signal compared with those exhibited by conventional micromachined tilt sensors with axis asymmetrical cavities. The maximum hysteresis of the output signal was approximately 0.1 V-rms when the sensor repeatedly tilted and leveled off. In addition to the fundamental characterization of the sensor, various characteristics of the all-polymer tilt sensor, such as time-dependent and electrolyte-volume-dependent variations in the output signal, were investigated in this study. While the performance of the proposed sensor was comparable to that of conventional silicon-micromachined tilt sensors, the sensor could be produced at a fraction of the cost required to fabricate the conventional sensors.
- 出版日期2013-6
