摘要

The TiN films were deposited by vacuum multi-arc ion plating on WC-Co substrate. The scratch tracks made with a micro-scratch tester(MST) were characterized with an optical microscope and scanning electron microscope (SEM). The adhesion at the interface of the TiN films and the substrate were then evaluated by calculating the acoustic emission and frictional force data obtained with the MST, and the optical images and SEM micrographs of the scratches. The results show that neither acoustic emission spectra nor friction force curve can exclusively determine the adhesion strength; the critical load and the interfacial adhesion can only be precisely evaluated by combining the acoustic emission spectra, the friction force curve and the Scratch truck morphologies. The measured result with the MST agrees well with that obtained with WS-92 scratch tester.

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