Note: Development of fast heating inert gas annealing apparatus operated at atmospheric pressure

作者:Das S C; Majumdar A*; Shripathi T; Hippler R
来源:Review of Scientific Instruments, 2012, 83(4): 046109.
DOI:10.1063/1.4704836

摘要

Here, we report the development of a simple, small, fast heating, and portable, homemade, inert gas (Ar) atmospheric annealing setup. Instead of using a conventional heating element, a commercial soldering rod having an encapsulated fast heating heater is used here. The sample holder is made of a block of stainless steel. It takes 200 s to reach 700 degrees C, and 10 min to cool down. The probability of oxidation or surface contamination has been examined by means of x ray photoelectron spectroscopy of virgin Cu sample after annealing at 600 degrees C. In addition, we compare the annealing of a hydrogenated carbon nitride film (HCNx) in both a conventional vacuum and our newly developed ambient Ar atmosphere setup.

  • 出版日期2012-4