科研之友
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摘要
Piezoelectric actuators are commonly used for nanopositioning due to their high resolution, low power consumption and wide operating frequency, but they suffer hysteresis, which affects linearity. In this paper, a novel digital charge amplifier is presented. Results show that hysteresis is reduced by 91% compared with a voltage amplifier, but over long operational periods the digital charge amplifier approach suffers displacement drift. A non-linear ARX model with long-term accuracy is used with a data fusion algorithm to remove the drift. Experimental results are presented.
- 出版日期2013-7
