Diamond-like carbon thin films with high density and low internal stress deposited by coupling DC/RF magnetron sputtering

作者：Liu, Lei; Wang, Tao; Huang, Jinglin; He, Zhibing^*; Yi, Yong; Du, Kai

来源：Diamond and Related Materials, 2016, 70: 151-158.

DOI：10.1016/j.diamond.2016.10.004

• DLC films
• DC/RF magnetron sputtering
• Mass density
• Internal stress

Diamond like carbon films (DLC) with high density and low internal stress are urgent demand for inertial confinement fusion (ICF) experiments. DLC films were deposited on Si-(100) substrates by coupling DC/RF magnetron sputtering with Ar as the working gas. The microstructure, mass density and internal stress of the DLC films have been studied. The films were characterized by Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), X-ray Reflectivity (XRR), surface profilometer, atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM), scratch test and nanoindentation techniques. It is found that the DLC films deposited by coupling DC/RF magnetron sputtering have relatively high mass density (2.25-236 g/cm(3)) and low internal stress (lower than 0.3 GPa) compared to those prepared by conventional deposition process. The results indicate that properties of the as-deposited DLC films are strongly dependent on the ion energy which is determined by the DC voltage. It suggests that the DLC films deposited by coupling DC/RF magnetron sputtering at optimum DC voltage could be potential candidate for ICF experiments and protective coating applications.

• 出版日期2016-11
• 单位中国工程物理研究院; 中国工程物理研究院激光聚变研究中心; 西南科技大学