Adaptive Neuro-Fuzzy Appraisal of Plasmonic Studies on Morphology of Deposited Silver Thin Films Having Different Thicknesses

作者：Noh Siti Munirah Che; Shamshirband Shahaboddin; Petkovic Dalibor^*; Penny Richard; Zakaria Rozalina

来源：Plasmonics, 2014, 9(5): 1189-1196.

DOI：10.1007/s11468-014-9730-3

• Ag
• Nanostructure
• Scanning electron microscopy (SEM)
• ANFIS method

This work presents an experimental analysis on the tunable localized surface plasmon resonance (LSPR), obtained from deposited silver (Ag) thin films of various thicknesses. Silver thin films are prepared using electron beam deposition and undergo an annealing process at different temperatures to produce distinctive sizes of Ag metal nanoparticles (MNPs). The variability of structure sizes and shapes provides an effective means of tuning the position of the LSPR within a wide wavelength range. This paper provides an estimation of LSPR over a broad wavelength range by a process in which the resonance spectra of silver nanoparticles differing in thickness are simulated using an adaptive neuro-fuzzy inference system (ANFIS) method. The ANFIS methodology allows for estimation of sizes of granular structures formed on top of a wafer at certain temperatures, whereupon these intelligent estimators are implemented using MATLAB and their subsequent performances are investigated. The results presented in this paper show the effectiveness of the method of simulation.

• 出版日期2014-10