Nanostructured PZT type thin films prepared by thermonic vacuum arc method

作者：Rasleanu D; Ionescu V; Prodan G; Ciupina V^*; Lungu C P; Surdu Bob C; Osiac M; Pompilian O; Badulescu M; Lungu A M; Ticos C; Zaroschi V; Trupina L; Miclea C

来源：Journal of Optoelectronics and Advanced Materials, 2008, 10(11): 3041-3047.

• PZT
• Perovskite
• Thin films
• XPS
• TEM
• AFM

PZT type films were prepared using the thermionic vacuum arc (TVA) method; a crucible filled PZT type powder (PbO/ZrO/TiO) was heated by a thermo-electron beam emitted by the circular cathode of the TVA gun. Applying high voltage potential (3000 +/- 200V) on the anode from a regulated HEINZINGER high voltage power supply the thermo-electrons were accelerated toward the anode crucible, evaporating the anode materials and initiating a plasma discharge. The morphology and the structure of the prepared films analyzed by transmission electron microscopy, (TEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy, showed nanostructured, smooth thin films with specific PZT stoichiometry.

• 出版日期2008-11