An innovative method and experiment for fabricating bulgy shape nanochannel using AFM

作者：Lin Zone Ching^*; Jheng Hao Yuan; Ding Hao Yang

来源：Applied Surface Science, 2015, 347: 347-358.

DOI：10.1016/j.apsusc.2015.04.042

• Specific down force energy(SDFE)
• Atomic force microscopy(AFM)
• Cutting
• Bulgy shape nanochannel
• Silicon substrate

The paper proposes using atomic force microscopy (AFM) and the concept of specific down force energy (SDFE) to establish an innovative offset cycle cutting method for fabricating a bulgy shape nanochannel on a single-crystal silicon substrate. In the offset cycle cutting method, cutting is performed at a constant down force in all cutting passes. After the first cutting pass, the AFM probe is offset rightward for the second pass and subsequently offset leftward to the middle (i.e., between the positions of the first two cutting passes) for the third cutting pass. Applying a step-by-step method to modify the offset distance and approach the defined SDFE value, this study determined the depth of the middle cutting pass and smaller values of upward bulginess and downward indentation at the bottom of the nanochannel. The nanochannel width can be increased by increasing the number of offset cycle cutting passes. In addition, by applying the proposed method, this study involved a simulation and experiment concerning the cutting path plan of bulgy shape nanochannels. Furthermore, using a small down force along the burr path is proposed for reducing burr height. The results of the simulation and experiment were compared to verify the feasibility of the method.

• 出版日期2015-8-30