Analysis of current instabilities of thin AlN/GaN/AlN double heterostructure high electron mobility transistors

作者：Zervos Ch^*; Adikimenakis A; Bairamis A; Kostopoulos A; Kayambaki M; Tsagaraki K; Konstantinidis G; Georgakilas A

来源：Semiconductor Science and Technology, 2016, 31(6): 065002.

DOI：10.1088/0268-1242/31/6/065002

• GaN
• HEMT
• AlN
• molecular beam epitaxy

The current instabilities of high electron mobility transistors (HEMTs), based on thin double AlN/GaN/AlN heterostructures (similar to 0.5 mu m total thickness), directly grown on sapphire substrates, have been analyzed and compared for different AlN top barrier thicknesses. The structures were capped by 1 nm GaN and non-passivated 1 mu m gate-length devices were processed. Pulsed I-V measurements resulted in a maximum cold pulsed saturation current of 1.4 A mm(-1) at a gate-source voltage of +3 V for 3.7 nm AlN thickness. The measured gate and drain lag for 500 ns pulse-width varied between 6%-12% and 10%-18%, respectively. Furthermore, a small increase in the threshold voltage was observed for all the devices, possibly due to the trapping of electrons under the gate contact. The off-state breakdown voltage of V-br = 70 V, for gate-drain spacing of 2 mu m, was approximately double the value measured for a single AlN/GaN HEMT structure grown on a thick GaN buffer layer. The results suggest that the double AlN/GaN/AlN heterostructures may offer intrinsic advantages for the breakdown and current stability characteristics of high current HEMTs.

• 出版日期2016-6