Asymmetric actuating structure generates negligible influence on the supporting base for high performance scanning probe microscopies

作者：Yan, Gang Yi^*; Liu, Yong Bin; Feng, Zhi Hua

来源：Applied Physics Letters, 2014, 104(6): 063506.

DOI：10.1063/1.4865210

An asymmetric actuating structure generating negligible influence on the supporting base for high performance scanning probe microscopies is proposed in this paper. The actuator structure consists of two piezostacks, one is used for actuating while the other is for counterbalancing. In contrast with balanced structure, the two piezostacks are installed at the same side of the supporting base. The effectiveness of the structure is proved by some experiments with the actuators fixed to the free end of a cantilever. Experimental results show that almost all of the vibration modes of the cantilever are suppressed effectively at a wide frequency range of 90 Hz-10 kHz.

• 出版日期2014-2-10
• 单位中国科学技术大学