Amorphous Metal Thin Films for Thermal Inkjet Printing

作者：McGlone John M^*; Pommerenck Jordan K; Graham Matt W; Wager John F

来源：Journal of Microelectromechanical Systems, 2018, 27(2): 289-295.

DOI：10.1109/JMEMS.2018.2794539

• Amorphous materials
• ink jet printing
• thin films
• cavitation plate

Due to the lack of grain boundaries, an amorphous metal thin film (AMTF) provides advantageous mechanical properties and enhanced chemical stability, which may enable its use as a thinner cavitation plate for thermal inkjet (TIJ) printing. A thinner cavitation plate leads to improved thermal performance. However, if an AMTF is to be used as a cavitation plate, it must remain amorphous during TIJ operation. In this paper, we fabricate TIJ resistors using a thermally stable (crystallization temperature >1000 degrees C) Ta30W30Si40 AMTF and stress the material in an open-pool test bed. This tests the stability of the thin film properties after being exposed to a TIJ-like environment. We find that the Ta30W30Si40 AMTF retains its amorphous structure after testing to > 10(7) pulses in the simulated TIJ environment. This suggests that Ta30W30Si40 AMTF is a promising candidate material for TIJ cavitation plate applications.

• 出版日期2018-4