科研之友
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摘要
A model has been developed that describes the propagation of the transient sheath which forms inside a cylindrical target immersed in a plasma for inner surface implantation. Following this model, a differential equation and its integrated solution are obtained for the sheath-edge position as a function of time. This result can be used to predict the final sheath extent during each pulse for inner surface implantation of a cylindrical target.
- 出版日期1996-1-14
- 单位中国科学院物理研究所
