科研之友
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摘要
Micro/nano combined free-standing diamond films were deposited by 30kW DC arc plasma jet CVD method on polycrystalline molybdenum substrate with mixed fed gasses of argon, hydrogen and methane. SEM, XRD, Raman spectra, TEM, HREM were adopted to analyze the films element and microstructure. Specially, focus iron beam (FIB) was used to execute the specimen in the experiment. The results showed that the multilayer diamond film with smooth surface consisted of micro-crystalline layers and nano-crystalline layers, comparing with the conventional microcrystalline diamond film. The boundary between micro-crystal layer and nano-crystal layer was nested by each other. The micro/nano combined structure diamond film embodied nano-sized diamond grain, micron-sized diamond grain and amorphous carbon.
- 出版日期2008
- 单位北京科技大学
