A magnetostrictive mini actuator for long-stroke positioning with nanometer resolution

作者:Yang BT*; Bonis M; Tao H; Prelle C; Lamarque F
来源:Journal of Micromechanics and Microengineering, 2006, 16(7): 1227-1232.
DOI:10.1088/0960-1317/16/7/016

摘要

Giant magnetostrictive material can generate about 1600 ppm strain, and with the solid-state deformation principle it has the potential to render high force and precise displacement with a small volume, which makes it suitable to realize efficient miniature actuators. We have developed an inchworm linear motion mini actuator (50 x 30 x 30 mm) which is required to position an object over a range of some millimeters with nanometer resolution. An analytical model has been established for step displacement in quasi-static conditions, depending nonlinearly on both the magnetic excitation and the mechanical prestress exerted on the rod. Tests with the actuator prototype show that it can move on a flat surface with a velocity of 97.2 mu m s(-1) and a positioning resolution of up to 4 nm.