Petri net modeling and deadlock analysis of multicluster tools in semiconductor manufacturing

作者：Zhu Qinghua^*; Wu Naiqi; Teng Shaohua

来源：Journal of Southeast University(Natural Science Edition), 2010, 40(SUPPL. 2): 267-271.

• Cluster tool
• Control policy
• Controlled transitions
• Deadlock analysis
• Deadlock avoidance
• Deadlock control
• Deadlock freedom
• Dynamical behaviors
• Initial state
• Liveness
• Modeling
• Multicluster tools
• Petri-net modeling
• Production process
• Semi-conductor wafer
• Semiconductor manufacturing
• Steady state
• Steady state process
• Structural characteristics
• Tool systems
• Transient process
• Wafer fabrications
• Wafer processing

Deadlock-freedom is essential for the operation of a cluster tool in semiconductor wafer manufacturing. This paper conducts a study of modeling multicluster tools and analysis of avoiding deadlock. After presenting the structural characteristics of multicluster tools, a resource-oriented Petri net(ROPN) model is developed for the architecture of multicluster tools. Then, by introducing colored tokens and controlled transitions into the model, wafer fabrication processes in multicluster tools can be well described. This model is compact and can describe not only the steady state process but also the initial and final transient processes. This model also shows how the production process is transferred from an initial state to the steady state. With this model, dynamical behavior, including liveness, is analyzed. Based on the analysis, a deadlock avoidance policy is proposed. It is shown that the system is deadlock-free if the control policy is applied. Thus, this model is helpful to schedule a multicluster tool system.

• 出版日期2010