Ultrafast atmospheric-pressure-plasma-jet processed conductive plasma-resistant Y2O3/carbon-nanotube nanocomposite

作者：Wu Chih Hung; Chen Jian Zhang

来源：Journal of Alloys and Compounds, 2015, 651: 357-362.

DOI：10.1016/j.jallcom.2015.08.085

• Atmospheric pressure plasma jet
• Y2O3
• Screen-printing
• Carbon nanotube
• Composite
• Nanoporous

We developed an ultrafast sintering process for a conductive plasma-resistant Y2O3/carbon-nanotube composite using an atmospheric-pressure-plasma jet (APPJ). The processing time can be as short as 3 -5 s. The incorporation of carbon nanotubes (CNTs) significantly improves the conductivity. A N-2 APPJ reacts violently with the CNTs and carbonaceous materials in the screen-printed pastes, enabling ultrafast processing. The synthesized films show great erosion resistance to low-pressure CHF3 inductively coupled plasma (ICP). The conductivity remains at a similar level after exposure to the CHF3 ICP for 30 min. This coating can serve as a protective layer in a low-pressure plasma environment. The high conductivity (similar to 0.01 S cm(-1)) is advantageous in preventing arcing or charging effects in the low-pressure plasma environment.

• 出版日期2015-12-5