A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

作者：Gao W^*; Kimura A

来源：CIRP Annals - Manufacturing Technology, 2010, 59(1): 505-508.

DOI：10.1016/j.cirp.2010.03.035

• Measurement
• Optical
• Interferometry

A planar scale grating with a pitch of 1 mu m used in an interferential scanning-type planar encoder, which produces multi-axis position signals based on interference between first-order diffracted beams from the grating, is evaluated by a 100 mm-aperture Fizeau interferometer. The out-of-flatness of the grating is first evaluated from the wavefront of the zero-order diffracted beam from the grating. The grating is then tilted to align the axes of the first-order diffracted beams with that of the interferometer so that the X-and Y-directional pitch deviations of the grating can be evaluated from the wavefronts of the first-order diffracted beams.

• 出版日期2010