Application of phase extension method to sub-angstrom transmission electron microscopy

作者：Kim Jin Gyu; Lee Sang Gil; Yoo Seung Jo; Shin Jae Won; Lee Seok Hoon; Kim Youn Joong^*

来源：Metals and Materials International, 2012, 18(5): 821-825.

DOI：10.1007/s12540-012-5011-x

• nanostructured materials
• crystal structure
• transmission electron microscopy
• precession electron diffraction
• phase extension

A sub- resolution analysis of a Si crystal structure was performed successfully using a phase extension technique that combined the high-voltage electron microscopy (HVEM) and energy-filtered precession electron diffraction (EF-PED) methods. The high resolution electron microscopy (HREM) image of Si [211] was obtained with a spatial resolution of 0.12 nm using HVEM. The electron diffraction of Si [211] was acquired with a spatial resolution of 0.06 nm by employing the EF-PED method. The phase information of Si [211] was extracted from a deconvoluted image by applying instrumental parameters. Its amplitude information with higher spatial resolution was quasi-kinematically extracted from EF-PED data. Finally, it was revealed that Si atoms were clearly separated with a resolution of 0.78 in the enhanced resolution image. Therefore, it is expected that the combination of the HVEM and EF-PED methods will be a useful and powerful tool for the quantitative characterization of nanostructured materials.

• 出版日期2012-10