A MEMS-based ionization gas sensor using carbon nanotubes

作者：Hou, Zhongyu^*; Wu, Hahao; Zhou, Weimin; Wei, Xing; Xu, Dong; Zhang, Yafang; Cai, Bingchu

来源：IEEE Transactions on Electron Devices, 2007, 54(6): 1545-1548.

DOI：10.1109/TED.2007.896370

• carbon nanotubes (CNTs)
• gas discharges
• ionization gas sensors
• microelectromechanical systems (MEMS)

We demonstrate here the successful operation of an ionization gas sensor with a gap spacing S of 2 or 7 /- 0.4 mu m and using carbon nanotubes as the electrode material. The device is chip based and fabricated using a microelectromechanical system process. Application of a bias of 0.6-1.8 V (S approximate to 2 mu m) or 12-15 V (S approximate to 7 mu m) to the electrodes generates an electric field that is sufficient to field ionize He, CO2, and their mixtures in air with high sensitivity and selectivity. The approach is considered as effective for lowering the operation voltage of ionization gas sensors below 36 V (safety voltage criterion) and is significant for the development of the smart device in this field.

• 出版日期2007-6
• 单位上海市纳米科技与产业发展促进中心; 上海交通大学