科研之友
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摘要
Computational analysis of electrostatic microelectromechanical systems (MEMS) requires an electrostatic analysis to compute the electrostatic forces acting on micromechanical structures and a mechanical analysis to compute the deformation of micromechanical structures. Typically,the mechanical analysis is performed on an undeformed geometry. However, the electrostatic analysis is performed on the deformed position of microstructures. In this paper, a new efficient approach to self-consistent analysis of electrostatic MEMS in the small deformation case is presented. In this approach,when the microstructures under go small deformations, the surface charge densities on the deformed geometry can be computed without up dating the geometry of the microstructures. This algorithm is based on the linear mode shapes of a microstructure as basis functions. A boundary integral equation for the electrostatic problem is expanded in to a Taylor series around the undeformed configuration, and a new coupled field equation is presented. This approach is validated by comparing its results with the results available in the literature and ANSYS solutions, and shows attractive features comparable to ANSYS.
- 出版日期2009-11
- 单位东南大学
