Multianalyte biosensor based on pH-sensitive ZnO electrolyte-insulator-semiconductor structures

作者：Kao Chyuan Haur; Chen Hsiang^*; Lee Ming Ling; Liu Che Chun; Ueng Herng Yih; Chu Yu Cheng; Chen Yu Jie; Chang Kow Ming

来源：Journal of Applied Physics, 2014, 115(18): 184701.

DOI：10.1063/1.4874182

Multianalyte electrolyte-insulator-semiconductor (EIS) sensors with a ZnO sensing membrane annealed on silicon substrate for use in pH sensing were fabricated. Material analyses were conducted using X-ray diffraction and atomic force microscopy to identify optimal treatment conditions. Sensing performance for various ions of Na+, K+, urea, and glucose was also tested. Results indicate that an EIS sensor with a ZnO membrane annealed at 600 degrees C exhibited good performance with high sensitivity and a low drift rate compared with all other reported ZnO-based pH sensors. Furthermore, based on well-established pH sensing properties, pH-ion-sensitive field-effect transistor sensors have also been developed for use in detecting urea and glucose ions. ZnO-based EIS sensors show promise for future industrial biosensing applications.

• 出版日期2014-5-14
• 单位长春大学