A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope

作者：Chang Ming Hui; Huang Han Pang^*

来源：Sensors (Switzerland), 2013, 13(3): 3568-3587.

DOI：10.3390/s130303568

• out-of-plane gyroscope
• parasitic-insensitive switched-capacitor (PISC)
• Sigma Delta ADC

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.

• 出版日期2013-3