Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering

作者：Moreira Milena A^*; Torndahl Tobias; Katardjiev Ilia; Kubart Tomas

来源：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , 2015, 33(2): 021518.

DOI：10.1116/1.4907874

Aluminum nitride thin films were deposited by reactive high power impulse magnetron sputtering (HiPIMS) and pulsed direct-current on Si (100) and textured Mo substrates, where the same deposition conditions were used for both techniques. The films were characterized by x-ray diffraction and atomic force microscopy. The results show a pronounced improvement in the AlN crystalline texture for all films deposited by HiPIMS on Si. Already at room temperature, the HiPIMS films exhibited a strong preferred (002) orientation and at 400 degrees C, no contributions from other orientations were detected. Despite the low film thickness of only 200 nm, an x-scan full width at half maximum value of 5.1 degrees was achieved on Si. The results are attributed to the high ionization of sputtered material achieved in HiPIMS. On textured Mo, there was no significant difference between the deposition techniques.

• 出版日期2015-3