摘要
We studied the emissive pits in InGaN films grown on compressive and strain-free GaN underlying layers. Pit density decreased with the full width at half maximum of omega(0002) of InGaN. The films grew on compressive and strain-free GaN underlying layers with spiral and step-flow modes, respectively. Carbon impurities accumulated inside the pits. Comparison of cathodoluminescence inside the pits and steady-state photocapacitance spectra showed that the energy level of the carbon impurities appeared at similar to 2.8 eV below the conduction band (E-c) for both types of pits. Deep-level defects at E-c - 2.4 eV resulting in green fluorescence emission were considered to originate from pits related to screw dislocations.
- 出版日期2017-1