A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology

作者：Li, Chen; Tan, Qiulin^*; Xue, Chenyang; Zhang, Wendong; Li, Yunzhi; Xiong, Jijun

来源：Sensors (Switzerland), 2014, 14(12): 23337-23347.

DOI：10.3390/s141223337

• wireless passive pressure sensor
• LTCC technology
• high temperature characterization
• high pressure characterization

An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/degrees C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar.

• 出版日期2014-12
• 单位中北大学