Anisotropic Bond Orientation of Amorphous Carbon by Deposition

作者:Saito Seiki*; Ito Atsushi M; Takayama Arimichi; Nakamura Hiroaki
来源:Japanese Journal of Applied Physics, 2012, 51(1): 01AC05.
DOI:10.1143/JJAP.51.01AC05

摘要

In general, diamond-like carbon is classified on the basis of the sp(2), sp(3), and hydrogen contents, otherwise known as the ternary phase diagram of amorphous carbon. In this study, however, it has been found that there is still some structural difference even though amorphous carbons may be located at the same point on the ternary phase diagram. Bond orientations of two types of amorphous carbon, arising in the deposition and annealing processes, are investigated, and it is shown that the bond orientations are totally different from each other even though the sp(2), sp(3), and hydrogen contents are the same.

  • 出版日期2012-1