Design, production, and reverse engineering of two-octave antireflection coatings

作者:Amotchkina Tatiana V*; Trubetskov Michael K; Pervak Vladimir; Tikhonravov Alexander V
来源:Applied Optics, 2011, 50(35): 6468-6475.
DOI:10.1364/AO.50.006468

摘要

We deal with design and production of optimal two-component antireflection (AR) coatings for an ultra broadband spectral range from 450 nm to 1800 nm. We demonstrate the whole design-production chain including design selection, choosing monitoring technique, coating production, and reverse engineering of the deposited coatings. At each step of this chain we provide thorough analysis on the basis of theoretical results and adequate computational manufacturing experiments. In order to produce the designed AR coatings we use magnetron sputtering deposition technique and accurate time monitoring.

  • 出版日期2011-12-10