An approach of dynamic bottleneck machine dispatching for semiconductor wafer fab

作者：Huai, Zhang^*; Jiang Zhibin; Lee Yen Fei; Ko Chen Pin; Tuck, Luke Choo Ooi; Phing, Lim Lee

来源：IEEE International Symposium on Semiconductor Manufacturing, United States, 2007-10-15 to 2007-10-17.

DOI：10.1109/ISSM.2007.4446814

• Bottleneck machines
• Control policy
• Decision parameters
• Desirability function
• Dynamic changes
• Response surface methodology
• Semi-conductor wafer fab
• Semiconductor wafer fabrication system

In contemporary semiconductor wafer fabrication system (SWFS), bottlenecks may be caused by various condition changes. Since many traditional bottleneck control policies did not address dynamic changes in conditions that generate bottlenecks, a dynamic bottleneck dispatching (DBD) policy is designed in this paper to make adaptive dispatching decisions according to the real-time conditions. Decision parameters of the proposed DBD algorithm are optimized by response surface methodology (RSM) and desirability function. Case studies are performed to compare DBD with several regular rules, and simulation. results prove that the proposed optimized DBD policy may achieve more satisfied performance.

• 出版日期2007
• 单位上海交通大学