Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturers

作者:Liu Wei Ting*; Li Kung Cheh
来源:Journal of the Air & Waste Management Association, 2011, 61(1): 85-91.
DOI:10.3155/1047-3289.61.1.85

摘要

Glass ceramics were prepared from mixtures of wastes generated from refining of waste glass and semiconductor industrial wastewater sludge. The aim is then indeed to study the possible use and effects of integrating calcium fluoride (CaF(2)) as present in semiconductor wastewater sludge in the silica (glass) melts. CaF(2) sludge was blended with a conditioner according to characteristics of the target. Calcium oxide-silicon dioxide-aluminum oxide system glass ceramics have relatively high melting points. Addition of CaF(2) sludge to fluxes can significantly reduce_the melting point and hence improve the kinetics of the reactions. CaF(2) sludge and waste glass were co-melted in various ratios to elucidate their interactions at various heating temperatures. The results indicate that the lowest melting temperature was 1163 degrees C, obtained for the CaF(2) sludge-waste glass mixture at a ratio 6:4 (wt:wt), which is significantly lower than that of CaF(2) sludge (1378 degrees C). The benefits of using melting to dispose of sludge are the reduction of waste and the fixation of heavy metals. Heat treatment was used to convert the obtained glass into glass ceramics. Heavy metal leaching tests revealed that melting conditions lowered the heavy metal concentrations in the leachate to an order of magnitude lower than that in the sludge. Consequently, industrial sludge can be safely used as a fine aggregate material for a potentially wide range of construction applications.

  • 出版日期2011-1