A Novel Radio Frequency Identification (RFID)-Based Thermal Convection Nonfloating-Type Accelerometer with Stacking Layers under Heater and Thermal Sensors

作者：Lin Jium Ming^*; Lin Cheng Hung; Yang Meng Hsuan; Lin Chia Hsien

来源：Sensors and Materials, 2015, 27(8): 651-662.

DOI：10.18494/sam.2015.1115

• radio frequency identification (RFID)
• thermal convection
• nonfloating type
• accelerometer
• stacking material

In this research, we propose a wireless nonfloating-type thermal convection accelerometer. The heaters and thermal sensors of the accelerometer were made on a flexible substrate with a stacking layer (aluminum nitride of 1 mm thickness), and it is different from traditional structures with a grooved chamber in the silicon substrate. Thus, one can integrate it and a wireless radio frequency identification (RFID) antenna on the same substrate, making it easy for fabrication and use. Moreover, xenon gas was applied to avoid the oxidizing effect produced by the previous ones with CO2 or air to increase the heater's reliability and life cycle. The performances of a traditional rectangular chamber with xenon or CO2 without a stacking layer had nonlinear effects. However, the cases with a stacking layer and xenon gas are always better. Both sensitivity and response time comparisons with a rectangular chamber, a stacking material, and filled by CO2 were also made (sensitivity: 0.182 degrees C/G); the sensitivity of the new one with a hemicylindrical chamber, xenon gas, and stacking layer was better (0.227 degrees C/G) and without a nonlinear effect in larger accelerations. Besides, the response times using either the hemicylindrical chamber and/or xenon gas were faster than those with the rectangular chamber and CO2 (600 mu s). The quickest one is 310 mu s by applying the proposed ideas.

• 出版日期2015
• 单位中国科学院电工研究所