Acoustoelastic Effects in Anisotropic Layered Structure of Cu/Si(001)

作者：Mseddi Souhir^*; Njeh Anouar; Ben Ghozlen Mohamed Hedi

来源：Mechanics of Advanced Materials and Structures, 2014, 21(9): 710-715.

DOI：10.1080/15376494.2012.707299

• acoustoelastic effect
• ODE
• SMM
• thin copper film

Theoretical studies aremade in order to evaluate the acoustoelastic effect of prestressed layered systems using the ordinary differential equation method (ODE) and the stiffness matrix method (SMM). The modifications for residual stresses consider the change of the density, the influence of residual stress, and the modification of the elastic stiffness tensor by residual strain and by third-order constants. For illustration, we use a layered system of copper deposited on a silicon substrate. The acoustoelastic effect is investigated for both Love and Rayleigh surface acoustic waves. The obtained results demonstrate the importance of the acoustoelasticity studies for the homogeneity examination.

• 出版日期2014