MEMS-based filter integrating tunable Fabry-Perot cavity and grating

作者：Shi, Zhendong^*; Fang, Liang; Zhong, Libo

来源：Optics Communications, 2017, 402: 472-477.

DOI：10.1016/j.optcom.2017.06.043

• Optical microelectromechanical devices
• Tunable optical filters
• Fabry-Perot cavities
• Gratings

We present a novel Micro-Electro-Mechanical-Systems (MEMS) filter integrating a tunable Fabry Perot cavity and a grating (FP-G). It fuses the functions of the Fabry Perot (FP) cavity and grating into a single device so as to realize both narrow spectral linewidth given by FP cavity and wide spectral range given by grating. A MEMS FP-G filter with 200 mu m cavity length was designed and fabricated. It is based on a W-shaped-section micro bridge structure by which the electrostatic actuator is independent on the FP cavity and a long cavity length can be configured. A grating etched in the back of a cavity mirror serves to spatially separate the transmitted. spectral lines corresponding to different interference. orders of FP cavity. Experimental results indicated that the MEMS FP-G filter obtained a broader operation spectral range compared with the traditional MEMS FP filter, and achieved 1.2 run spectral linewidth, which could be narrower by improving the effective finesse of the FP cavity in the fabrication process. Compared with the simulation results, there was considerable room for improvement in device performance by the optimal technique.

• 出版日期2017-11-1
• 单位中国科学院光电技术研究所; 核工业西南物理研究院