MEMS 3-D Scan Mirror With SU-8 Membrane and Flexures for High NA Microscopy

作者：Liu Tianbo^*; Svidunovich Aaron J; Wollant Benjamin C; Dickensheets David L

来源：Journal of Microelectromechanical Systems, 2018, 27(4): 719-729.

DOI：10.1109/JMEMS.2018.2845375

• MEMS 3-dimensional scanner
• biaxial gimbal
• varifocal mirror
• SU-8
• laser microscopy
• cancer detection

We demonstrate a micro-electro-mechanical systems (MEMS) beam scanner capable of biaxial scanning with simultaneous focus control, for integration into a handheld confocal microscope for skin imaging. The device is based on a dual-axis gimbal structure with an integrated large-stroke deformable mirror. SU-8 polymer is used to construct both the deformable membrane as well as the torsional hinges for biaxial scanning. The 4-mm-diameter mirror can perform raster pattern scanning with a range of +1-1.5 degrees and Lissajous scanning with a range of +1-3 degrees (mechanical scan angle), and has a maximum deflection of 9 mu m for focus control. The design, fabrication, and characterization of the opto-mechanical performance of the MEMS device are presented in this paper.

• 出版日期2018-8