The microstructure and magnetic properties of Co2MnSi thin films deposited on Si substrate

作者:Yang, Fujun; Li, Wanjun; Li, Jihui; Chen, Hongbo; Liu, Degao; Chen, Xiaoqin*; Yang, Changping
来源:Journal of Alloys and Compounds, 2017, 723: 188-191.
DOI:10.1016/j.jallcom.2017.06.232

摘要

Co2MnSi (CMS) thin films with different thickness were deposited on Si substrate and annealed at different temperatures to investigate the evolution of microstructure and magnetic properties. When T-a was fixed at 500 degrees C, due to the enhancement of B2-ordering, the increasing of CMS thickness to 100 nm will induce the increasing of M-s to 862 emu/cc. When CMS film thickness was fixed at 75 nm, the abnormal decrease of the Ms value from 782 emu/cc to 614 emu/cc were observed with increasing Ta to 700 degrees C which may be attributed to the intermixing between CMS layer and Ta layer.